This is not fully tested.
Internal there were tests made in which the mp6 micropumps could reach 3 µl/min. It might be able to go lower.
The lowest flow rate is very dependent on the conditions in the customers test system. Generally, a flow rate of about 20 µl/min for liquids can be achieved in most cases. With thorough optimization much lower rates can be achieved. In order to ensure stable pump performance, if possible, the frequency should be lowered first and the amplitude should be kept as high as possible. If necessary, a precision orifice can be used to limit the outlet flow additionally.